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Patterning of GaN by ion implantation-dependent etching
Patterning of GaN by ion implantation-dependent etching
Patterning of GaN by ion implantation-dependent etching
Schiestel, S. (Autor:in) / Molnar, B. (Autor:in) / Carosella, C. A. (Autor:in) / Knies, D. (Autor:in) / Stroud, R. M. (Autor:in) / Edinger, K. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 82 ; 111 - 113
01.01.2001
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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