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Patterning of GaN by ion implantation-dependent etching
Patterning of GaN by ion implantation-dependent etching
Patterning of GaN by ion implantation-dependent etching
Schiestel, S. (author) / Molnar, B. (author) / Carosella, C. A. (author) / Knies, D. (author) / Stroud, R. M. (author) / Edinger, K. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 82 ; 111 - 113
2001-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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