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A New Scanning Probe Lithography Scheme with a Novel Metal Resist
A New Scanning Probe Lithography Scheme with a Novel Metal Resist
A New Scanning Probe Lithography Scheme with a Novel Metal Resist
Rolandi, M. (Autor:in) / Quate, C. F. (Autor:in) / Dai, H. (Autor:in)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 14 ; 191-194
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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