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A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth
A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth
A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth
Oyanagi, N. (Autor:in) / Nishizawa, S. (Autor:in) / Arai, K. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 107-110
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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