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A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth

Oyanagi, N. / Nishizawa, S. / Arai, K.

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A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth

Oyanagi, N. / Nishizawa, S. / Arai, K.

A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth

Oyanagi, N. / Nishizawa, S. / Arai, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Method of Reducing Micropipes in Thin Films by Using Sublimation Growth

Contributors:

Oyanagi, N. (author) / Nishizawa, S. (author) / Arai, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 107-110

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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