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Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Kimoto, T. (Autor:in) / Nakazawa, S. (Autor:in) / Fujihira, K. (Autor:in) / Hirao, T. (Autor:in) / Nakamura, S. (Autor:in) / Chen, Y. (Autor:in) / Hashimoto, K. (Autor:in) / Matsunami, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 165-170
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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