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Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Kimoto, T. (author) / Nakazawa, S. (author) / Fujihira, K. (author) / Hirao, T. (author) / Nakamura, S. (author) / Chen, Y. (author) / Hashimoto, K. (author) / Matsunami, H. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 165-170
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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