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Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Takahashi, K. (Autor:in) / Uchida, M. (Autor:in) / Yokogawa, T. (Autor:in) / Kusumoto, O. (Autor:in) / Yamashita, K. (Autor:in) / Miyanaga, R. (Autor:in) / Kitabatake, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 389/393 ; 243-246
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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