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Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD
Takahashi, K. (author) / Uchida, M. (author) / Yokogawa, T. (author) / Kusumoto, O. (author) / Yamashita, K. (author) / Miyanaga, R. (author) / Kitabatake, M. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 243-246
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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