Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density

Saddow, S.E. / Mazzola, M.S. / Rendakova, S.V. et al. | British Library Online Contents | 1999

Defect Characterization of 4H-SiC Bulk Crystals Grown on Micropipe Filled Seed Crystals

Kato, T. / Kojima, K. / Nishizawa, S. I. et al. | British Library Online Contents | 2005

Methods for the reduction of the micropipe density in SiC single crystals

Liu, J. L. / Gao, J. Q. / Cheng, J. K. et al. | British Library Online Contents | 2007

Growth of Low Micropipe Density SiC Wafers

Powell, A. / Wang, S. / Brandes, G. | British Library Online Contents | 2000

4H-SiC Device Scaling Development on Repaired Micropipe Substrates

Schattner, T. E. / Casady, J. B. / Smith, M. C. D. et al. | British Library Online Contents | 2000