Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals: Fid-Bau Portal

Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals

Saddow, S. E. / Elkington, T. / Smith, M. C. D.

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Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals

Saddow, S. E. / Elkington, T. / Smith, M. C. D.

Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals

Saddow, S. E. / Elkington, T. / Smith, M. C. D.

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Document information

Title:

Reduced Micropipe Density in Boule-Derived 6H-SiC Substrates via H Etching of Seed Crystals

Contributors:

Saddow, S. E. (author) / Elkington, T. (author) / Smith, M. C. D. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 399-402

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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