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Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3-Ta2O5 alloys
Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3-Ta2O5 alloys
Fixed charge and interface traps at heterovalent interfaces between Si(100) and non-crystalline Al2O3-Ta2O5 alloys
Johnson, R. S. (Autor:in) / Lucovsky, G. (Autor:in) / Hong, J. G. (Autor:in)
APPLIED SURFACE SCIENCE ; 190 ; 43-47
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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