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Microscopic mechanism of thermal silicon oxide growth
Microscopic mechanism of thermal silicon oxide growth
Microscopic mechanism of thermal silicon oxide growth
Uematsu, M. (Autor:in) / Kageshima, H. (Autor:in) / Shiraishi, K. (Autor:in)
COMPUTATIONAL MATERIALS SCIENCE ; 24 ; 229-234
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
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