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    Microscopic mechanism of thermal silicon oxide growth

    New search for: Uematsu, M.
    New search for: Kageshima, H.
    New search for: Shiraishi, K.

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    Microscopic mechanism of thermal silicon oxide growth

    New search for: Uematsu, M.
    New search for: Kageshima, H.
    New search for: Shiraishi, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microscopic mechanism of thermal silicon oxide growth

    New search for: Uematsu, M.
    New search for: Kageshima, H.
    New search for: Shiraishi, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Microscopic mechanism of thermal silicon oxide growth

    Contributors:

    Uematsu, M. (author) / Kageshima, H. (author) / Shiraishi, K. (author)

    Published in:

    COMPUTATIONAL MATERIALS SCIENCE ; 24 ; 229-234

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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