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Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Wu, S.-K. (Autor:in) / Tseng, K.-H. (Autor:in)
MATERIALS TRANSACTIONS ; 43 ; 871-875
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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