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Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Composition Control of R.F.-Sputtered Ni~2MnGa Thin Films Using Optical Emission Spectroscopy
Wu, S.-K. (author) / Tseng, K.-H. (author)
MATERIALS TRANSACTIONS ; 43 ; 871-875
2002-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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