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A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
Zhu, L. (Autor:in) / Liew, T. (Autor:in) / Chong, T. C. (Autor:in)
APPLIED SURFACE SCIENCE ; 189 ; 53-58
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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