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A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
A novel method for film thickness measurement of perfluoropolyether lubricant by secondary ion mass spectroscopy
Zhu, L. (author) / Liew, T. (author) / Chong, T. C. (author)
APPLIED SURFACE SCIENCE ; 189 ; 53-58
2002-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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