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Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Masuda, Y. (Autor:in) / Wang, D. (Autor:in) / Yonezawa, T. (Autor:in) / Koumoto, K. (Autor:in)
KEY ENGINEERING MATERIALS ; 125-130
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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