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Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Site-Selective Deposition of TiO~2 Thin Films Using Self-Assembled Monolayers and Their Dielectric Properties
Masuda, Y. (author) / Wang, D. (author) / Yonezawa, T. (author) / Koumoto, K. (author)
KEY ENGINEERING MATERIALS ; 125-130
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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