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Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Kanakura, N. (Autor:in) / Shinohara, M. (Autor:in) / Watanabe, H. (Autor:in) / Kuwano, T. (Autor:in) / Seyama, A. (Autor:in) / Kimura, Y. (Autor:in) / Niwano, M. (Autor:in)
SURFACE REVIEW AND LETTERS ; 9 ; 803-810
01.01.2002
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
530.417
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