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Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Synchrotron Radiation Photoemission and Infrared Spectroscopy Study of Adsorption and Decomposition of Dichlorosilane on Si(100)(2 x 1)
Kanakura, N. (author) / Shinohara, M. (author) / Watanabe, H. (author) / Kuwano, T. (author) / Seyama, A. (author) / Kimura, Y. (author) / Niwano, M. (author)
SURFACE REVIEW AND LETTERS ; 9 ; 803-810
2002-01-01
8 pages
Article (Journal)
English
DDC:
530.417
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