Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials
Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials
Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials
Sugioka, K. (Autor:in) / Akane, T. (Autor:in) / Obata, K. (Autor:in) / Toyoda, K. (Autor:in) / Midorikawa, K. (Autor:in)
APPLIED SURFACE SCIENCE ; 197-198 ; 814-821
01.01.2002
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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