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Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films
Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films
Imaging by time-of-flight secondary ion mass spectrometry of plasma patterned metal and oxide thin films
Coullerez, G. (Autor:in) / Baborowski, J. (Autor:in) / Viornery, C. (Autor:in) / Chevolot, Y. (Autor:in) / Xanthopoulos, N. (Autor:in) / Ledermann, N. (Autor:in) / Muralt, P. (Autor:in) / Setter, N. (Autor:in) / Mathieu, H. J. (Autor:in)
APPLIED SURFACE SCIENCE ; 203-204 ; 527-531
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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