Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology
A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology
A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology
Kim, J. W. (Autor:in) / Yamagata, Y. (Autor:in) / Morita, S. (Autor:in) / Moriyasu, S. (Autor:in) / Ohmori, H. (Autor:in) / Higuchi, T. (Autor:in) / Gao, Y. / Tamaki, J. / Kitajima, K.
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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