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    A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

    New search for: Kim, J. W.
    New search for: Yamagata, Y.
    New search for: Morita, S.
    New search for: Moriyasu, S.
    New search for: Ohmori, H.
    New search for: Higuchi, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kitajima, K.

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    A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

    New search for: Kim, J. W.
    New search for: Yamagata, Y.
    New search for: Morita, S.
    New search for: Moriyasu, S.
    New search for: Ohmori, H.
    New search for: Higuchi, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kitajima, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

    New search for: Kim, J. W.
    New search for: Yamagata, Y.
    New search for: Morita, S.
    New search for: Moriyasu, S.
    New search for: Ohmori, H.
    New search for: Higuchi, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kitajima, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    A Study of the Fabrication of Multi-Layer Microstructures Using ELID Grinding and the Thick Photoresist Lithography Technology

    Contributors:

    Kim, J. W. (author) / Yamagata, Y. (author) / Morita, S. (author) / Moriyasu, S. (author) / Ohmori, H. (author) / Higuchi, T. (author) / Gao, Y. / Tamaki, J. / Kitajima, K.

    Published in:

    Advances in Abrasive Technology V ; 19-22

    KEY ENGINEERING MATERIALS

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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