Polishing Characteristics on Silicon Wafer Using Fixed Nano-Sized Abrasive Pad

Tso, P.L. / Shih, C.Y. | British Library Online Contents | 2009

Fixed Abrasive Lapping and Polishing of Hard Brittle Materials

Li, J. / Zhu, Y.W. / Zuo, D.W. et al. | British Library Online Contents | 2010

Status and Trends of Fixed Abrasive Polishing on Semiconductor

Zhao, Y. / Zuo, D.W. / Sun, Y.L. | British Library Online Contents | 2012

Simulation on the Melting Rate of the Iced Fixed-Abrasive Polishing Plate

Kang, J. / Zuo, D.W. / Sun, Y.L. et al. | British Library Online Contents | 2010

Analysis of Path Distribution in Lapping and Polishing with Single Fixed Abrasive

Lu, L.Y. / Fang, C.F. / Shen, J.Y. et al. | British Library Online Contents | 2014