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Effect of substrates on epitaxial PZT films by a coating photolysis process
Effect of substrates on epitaxial PZT films by a coating photolysis process
Effect of substrates on epitaxial PZT films by a coating photolysis process
Tsuchiya, T. (Autor:in) / Yamaguchi, I. (Autor:in) / Manabe, T. (Autor:in) / Kumagai, T. (Autor:in) / Mizuta, S. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 207-210
01.01.2002
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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