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Effect of substrates on epitaxial PZT films by a coating photolysis process

Tsuchiya, T. / Yamaguchi, I. / Manabe, T. / Kumagai, T. / Mizuta, S.

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Effect of substrates on epitaxial PZT films by a coating photolysis process

Tsuchiya, T. / Yamaguchi, I. / Manabe, T. / Kumagai, T. / Mizuta, S.

Effect of substrates on epitaxial PZT films by a coating photolysis process

Tsuchiya, T. / Yamaguchi, I. / Manabe, T. / Kumagai, T. / Mizuta, S.

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Check availability in my library

Order at Subito €

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Document information

Title:

Effect of substrates on epitaxial PZT films by a coating photolysis process

Contributors:

Tsuchiya, T. (author) / Yamaguchi, I. (author) / Manabe, T. (author) / Kumagai, T. (author) / Mizuta, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 207-210

Publication date:

2002-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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