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Silicon dioxide thin film removal using high-power nanosecond lasers
Silicon dioxide thin film removal using high-power nanosecond lasers
Silicon dioxide thin film removal using high-power nanosecond lasers
Magyar, J. (Autor:in) / Sklyarov, A. (Autor:in) / Mikaylichenko, K. (Autor:in) / Yakovlev, V. (Autor:in)
APPLIED SURFACE SCIENCE ; 207 ; 306-313
01.01.2003
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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