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    Silicon dioxide thin film removal using high-power nanosecond lasers

    New search for: Magyar, J.
    New search for: Sklyarov, A.
    New search for: Mikaylichenko, K.
    New search for: Yakovlev, V.

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    Silicon dioxide thin film removal using high-power nanosecond lasers

    New search for: Magyar, J.
    New search for: Sklyarov, A.
    New search for: Mikaylichenko, K.
    New search for: Yakovlev, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Silicon dioxide thin film removal using high-power nanosecond lasers

    New search for: Magyar, J.
    New search for: Sklyarov, A.
    New search for: Mikaylichenko, K.
    New search for: Yakovlev, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Silicon dioxide thin film removal using high-power nanosecond lasers

    Contributors:

    Magyar, J. (author) / Sklyarov, A. (author) / Mikaylichenko, K. (author) / Yakovlev, V. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 207 ; 306-313

    Publication date:

    2003-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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