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Mechanical properties of nitrogen-doped CZ silicon crystals
Mechanical properties of nitrogen-doped CZ silicon crystals
Mechanical properties of nitrogen-doped CZ silicon crystals
Orlov, V. (Autor:in) / Richter, H. (Autor:in) / Fischer, A. (Autor:in) / Reif, J. (Autor:in) / Muller, T. (Autor:in) / Wahlich, R. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 403-407
01.01.2002
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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