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    Mechanical properties of nitrogen-doped CZ silicon crystals

    New search for: Orlov, V.
    New search for: Richter, H.
    New search for: Fischer, A.
    New search for: Reif, J.
    New search for: Muller, T.
    New search for: Wahlich, R.

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    Mechanical properties of nitrogen-doped CZ silicon crystals

    New search for: Orlov, V.
    New search for: Richter, H.
    New search for: Fischer, A.
    New search for: Reif, J.
    New search for: Muller, T.
    New search for: Wahlich, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mechanical properties of nitrogen-doped CZ silicon crystals

    New search for: Orlov, V.
    New search for: Richter, H.
    New search for: Fischer, A.
    New search for: Reif, J.
    New search for: Muller, T.
    New search for: Wahlich, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Mechanical properties of nitrogen-doped CZ silicon crystals

    Contributors:

    Orlov, V. (author) / Richter, H. (author) / Fischer, A. (author) / Reif, J. (author) / Muller, T. (author) / Wahlich, R. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 403-407

    Publication date:

    2002-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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