Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN: Fid-Bau Portal

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

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Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

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Titel:

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Beteiligte:

Levashov, E. A. (Autor:in) / Larikhin, D. V. (Autor:in) / Shtansky, D. V. (Autor:in) / Rogachev, A. S. (Autor:in) / Grigoryan, H. E. (Autor:in) / Moore, J. J. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS SYNTHESIS AND PROCESSING ; 10 ; 319-330

Erscheinungsdatum:

01.01.2002

Format / Umfang:

12 pages

ISSN:

1064-7562

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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