Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN: Fid-Bau Portal

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

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Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Levashov, E. A. / Larikhin, D. V. / Shtansky, D. V. / Rogachev, A. S. / Grigoryan, H. E. / Moore, J. J.

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Document information

Title:

Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB2-TiN or Ti5Si3-TiN

Contributors:

Levashov, E. A. (author) / Larikhin, D. V. (author) / Shtansky, D. V. (author) / Rogachev, A. S. (author) / Grigoryan, H. E. (author) / Moore, J. J. (author)

Published in:

JOURNAL OF MATERIALS SYNTHESIS AND PROCESSING ; 10 ; 319-330

Publication date:

2002-01-01

Size:

12 pages

ISSN:

1064-7562

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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