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Oxygen radical treatment applied to ferroelectric thin films
Oxygen radical treatment applied to ferroelectric thin films
Oxygen radical treatment applied to ferroelectric thin films
Takahashi, I. (Autor:in) / Sakurai, H. (Autor:in) / Yamada, A. (Autor:in) / Funaiwa, K. (Autor:in) / Hirai, K. (Autor:in) / Urabe, S. (Autor:in) / Goto, T. (Autor:in) / Hirayama, M. (Autor:in) / Teramoto, A. (Autor:in) / Sugawa, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 216 ; 239-245
01.01.2003
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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