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Combined growth of Si nanoparticles and crystallized silicon layers at 200degreeC by reactive magnetron sputtering
Combined growth of Si nanoparticles and crystallized silicon layers at 200degreeC by reactive magnetron sputtering
Combined growth of Si nanoparticles and crystallized silicon layers at 200degreeC by reactive magnetron sputtering
Leconte, Y. (Autor:in) / Marie, P. (Autor:in) / Portier, X. (Autor:in) / Lejeune, M. (Autor:in) / Rizk, R. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 101 ; 194-198
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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