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Deterioration of aluminum induced crystallization of sputtered silicon by film stress
Deterioration of aluminum induced crystallization of sputtered silicon by film stress
Deterioration of aluminum induced crystallization of sputtered silicon by film stress
Hsu, C. M. (Autor:in) / Yu, M. C. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1079-1081
01.01.2003
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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