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Conditions for Micropipe Dissociation by 4H-SiC CVD Growth
Conditions for Micropipe Dissociation by 4H-SiC CVD Growth
Conditions for Micropipe Dissociation by 4H-SiC CVD Growth
Kamata, I. (Autor:in) / Tsuchida, H. (Autor:in) / Jikimoto, T. (Autor:in) / Miyanagi, T. (Autor:in) / Izumi, K. (Autor:in) / Bergman, P. / Janzen, E.
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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