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Calculation of sputtering rate by a Monte Carlo method
Calculation of sputtering rate by a Monte Carlo method
Calculation of sputtering rate by a Monte Carlo method
Hsieh, J. H. (Autor:in) / Li, C. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1125-1126
01.01.2003
2 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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