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Calculation of sputtering rate by a Monte Carlo method

Hsieh, J. H. / Li, C.

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Calculation of sputtering rate by a Monte Carlo method

Hsieh, J. H. / Li, C.

Calculation of sputtering rate by a Monte Carlo method

Hsieh, J. H. / Li, C.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Calculation of sputtering rate by a Monte Carlo method

Contributors:

Hsieh, J. H. (author) / Li, C. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1125-1126

Publication date:

2003-01-01

Size:

2 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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