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Preparing an acrylic ester copolymer as an ultrathick negative photo resist
Preparing an acrylic ester copolymer as an ultrathick negative photo resist
Preparing an acrylic ester copolymer as an ultrathick negative photo resist
Cheng, T. S. (Autor:in) / Lee, H. Y. (Autor:in) / Lee, C. T. (Autor:in) / Chen, H. (Autor:in) / Lin, H. T. (Autor:in)
MATERIALS LETTERS ; 57 ; 4578-4582
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
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