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Optimal design of multilayered polysilicon films for prescribed curvature
Optimal design of multilayered polysilicon films for prescribed curvature
Optimal design of multilayered polysilicon films for prescribed curvature
Ni, A. (Autor:in) / Sherman, D. (Autor:in) / Ballarini, R. (Autor:in) / Kahn, H. (Autor:in) / Mi, B. (Autor:in) / Phillips, S. M. (Autor:in) / Heuer, A. H. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 38 ; 4169-4173
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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