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Optimal design of multilayered polysilicon films for prescribed curvature
Optimal design of multilayered polysilicon films for prescribed curvature
Optimal design of multilayered polysilicon films for prescribed curvature
Ni, A. (author) / Sherman, D. (author) / Ballarini, R. (author) / Kahn, H. (author) / Mi, B. (author) / Phillips, S. M. (author) / Heuer, A. H. (author)
JOURNAL OF MATERIALS SCIENCE ; 38 ; 4169-4173
2003-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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