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Fabrication of ITO thin films by filtered cathodic vacuum arc deposition
Fabrication of ITO thin films by filtered cathodic vacuum arc deposition
Fabrication of ITO thin films by filtered cathodic vacuum arc deposition
Chen, B. J. (Autor:in) / Sun, X. W. (Autor:in) / Tay, B. K. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 106 ; 300-304
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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