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Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Karunagaran, B. (Autor:in) / Rajendra Kumar, R. T. (Autor:in) / Senthil Kumar, V. (Autor:in) / Mangalaraj, D. (Autor:in) / Narayandass, S. K. (Autor:in) / Mohan Rao, G. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 547-550
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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