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Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Structural characterization of DC magnetron-sputtered TiO2 thin films using XRD and Raman scattering studies
Karunagaran, B. (author) / Rajendra Kumar, R. T. (author) / Senthil Kumar, V. (author) / Mangalaraj, D. (author) / Narayandass, S. K. (author) / Mohan Rao, G. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 547-550
2003-01-01
4 pages
Article (Journal)
English
DDC:
621.38152
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