Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Plasma etch prediction using genetic algorithm based polynomial neural network
Plasma etch prediction using genetic algorithm based polynomial neural network
Plasma etch prediction using genetic algorithm based polynomial neural network
Kim, D.-W. (Autor:in) / Kim, B. (Autor:in) / Shim, I.-J. (Autor:in) / Park, G.-T. (Autor:in)
SURFACE ENGINEERING -LONDON- ; 20 ; 31-36
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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