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Plasma etch prediction using genetic algorithm based polynomial neural network
Plasma etch prediction using genetic algorithm based polynomial neural network
Plasma etch prediction using genetic algorithm based polynomial neural network
Kim, D.-W. (author) / Kim, B. (author) / Shim, I.-J. (author) / Park, G.-T. (author)
SURFACE ENGINEERING -LONDON- ; 20 ; 31-36
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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