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Structural and Optical Features of Si-Rich SiO~2 Films Prepared by Magnetron Sputter Techniques
Structural and Optical Features of Si-Rich SiO~2 Films Prepared by Magnetron Sputter Techniques
Structural and Optical Features of Si-Rich SiO~2 Films Prepared by Magnetron Sputter Techniques
Kim, S. W. (Autor:in) / Cho, N. H. (Autor:in) / Im, S. G. (Autor:in) / Kang, S.-G. / Kobayashi, T.
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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